| http://www.w3.org/ns/prov#value | - by mixing nonabrasive solutions containing water and ammonia, with homopolymers and copolymers of acrylic acid crosslinked with polyoxyalkylene glycolsUS7147543Jul 28, 2005Dec 12, 2006Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS7151056Sep 15, 2003Dec 19, 2006Micron Technology, In.CMethod and a
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