PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Subsequent processing steps may then be performed e.g. further deposition and etching of semiconductor, insulative and metallic layers.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com.au