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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, since silicon nitride is an insulator and has high electric resistance, it can provide an air bearing surface protection film of excellent electrical insulative property compared with silicon in the prior art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com