| http://www.w3.org/ns/prov#value | - Further, an excimer laser such as ArF and KrF, an Nd-YAG laser, a Ti:Al2 O3 laser and the high harmonics thereof, or a dye laser, which absorbs in the form of one photon or multi-photon absorption, are also applicable to the manufacturing of the diffraction grating according to the present invention.
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