About: http://webisa.webdatacommons.org/408571680

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During the etching process, an endpoint detection method is used to evaluate and control the progress of etching through the dielectric layer, such as to stop or change the etching at a predetermined trench etch depth.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es