About: http://webisa.webdatacommons.org/408673327

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, if the track width of a recording head becomes very minute, especially equal to or less than 0.5 ??m, the process precision with submicron width is also required in the top pole layer 116.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com