About: http://webisa.webdatacommons.org/408803184

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During semiconductor substrate processing, reaction by-products, vapor, fumes, and other materials are routinely generated and need to be abated in accordance with various government safety guidelines.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com