About: http://webisa.webdatacommons.org/408893397

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, for materials such as silicon nitride or silicon oxide, deposition or a combination of silicon deposition and nitridation or oxidation may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com