About: http://webisa.webdatacommons.org/409029183

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the gate dielectric is a material that can be deposited using plasma-based deposition techniques, an integrated gate dielectric/polymeric layer can be obtained.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com