About: http://webisa.webdatacommons.org/409068243

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein said substrate is a semiconductor wafer, and wherein said circuit is an integrated circuit fabricated upon said semiconductor wafer.3.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com