About: http://webisa.webdatacommons.org/409259153

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon bench 1 comprises a silicon substrate 5 to which a process such as etching has been performed, and the process thereof will be described later in detail.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au