About: http://webisa.webdatacommons.org/40932483

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, this invention is applicable to apparatuses for processing wafer-shaped objects, other than semiconductor wafers, such as LCD substrates, printed boards, photo marks, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es