About: http://webisa.webdatacommons.org/409535792

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ???thin film??? in the present invention means a film formed by thin-film forming techniques such as sputtering, vacuum evaporation, CVD or plating, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com