PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Photolithography is a well known technique in the prior art for selectively etching the surface of a member, the surface of the member comprising a metal or semiconductor material to form a desired pattern on the underlying substrate of the member.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com