About: http://webisa.webdatacommons.org/409858250

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The preferred embodiment described above, however, is particularly efficient in that it makes use of the same tool and chemicals used to etch photoresist region 22A.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr