About: http://webisa.webdatacommons.org/410017038

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protective dielectric can be an oxide, such as silicon oxide, or silicon nitride deposited and patterned using techniques well known to those skilled in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com