About: http://webisa.webdatacommons.org/410239045

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An even flow rate through a liquid transfer system provides improved overall purity in the liquid delivered to the end use station which is very important in processes such as semiconductor manufacturing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com