About: http://webisa.webdatacommons.org/410267854

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In contrast, previous methods that claimed to form pure metal containing layers with high dielectric constants in fact did have silicon, carbon and other impurities in at least some portions of the layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es