About: http://webisa.webdatacommons.org/410364844

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An ion implanter implants impurity ions into a semiconductor substrate to form doped regions, such as sources and drains.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com