About: http://webisa.webdatacommons.org/410413156

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a preferred embodiment, second computer system 4010 is coupled to an apparatus for processing substrates 4070, such as semiconductor wafers, flat panel display substrates, or other types of substrates.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com