About: http://webisa.webdatacommons.org/411113328

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a result, the diffusion of the implanted ions is reduced during further steps, in particular steps comprising an increased temperature used to activate an implantation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com