About: http://webisa.webdatacommons.org/411141897

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As smudges on a film surface in the initial period of deposition, the adhering of impurities such as oxygen, carbon, fluorine and metal ions, to the surface is considered.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com