About: http://webisa.webdatacommons.org/411327733

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate used in the following examples was a freshly cleaned silicon wafer, however, other substrates such as glass, quartz, and polymers may be substituted for the silicon wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com