About: http://webisa.webdatacommons.org/41134004

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 17 is a graph, showing the history of the cup exhaust amount during the resist coating treatment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com