| http://www.w3.org/ns/prov#value | - The third region may be formed by providing silane gas at a flow rate between about 1,000 sccm and about 3,000 sccm, for example about 1,500 sccm, hydrogen gas at a flow rate between about 100,000 sccm and about 300,000 sccm, for example about 150,000 sccm, and RF power between 0.2 Watts/cm2 and about 0.6 Watts/cm2, for example about 0.45 Watts/cm2.
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