About: http://webisa.webdatacommons.org/411439348

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface of the substrate can then be etched by a liquid or gas such as hydrogen fluoride or argon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com