About: http://webisa.webdatacommons.org/411593726

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein the first feature is a contact hole and the second feature is a trench.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com