About: http://webisa.webdatacommons.org/411705581

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The base film 102 can be formed of a single layer or a stacked-layer structure of an insulating layer such as a silicon oxide film, a silicon nitride film, or a silicon oxynitride film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com