About: http://webisa.webdatacommons.org/41175717

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2E is a fifth schematic cross sectional view continuing the process of FIG. 2D and showing a state where the vertical vias in the interlayer dielectric have been filled with metal;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com