About: http://webisa.webdatacommons.org/411769699

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Chamber 102 b may additionally be configured as a pre-clean chamber for redundancy or for throughput, or be configured as a deposition, etch or other process or process support chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com