About: http://webisa.webdatacommons.org/411859648

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The microcantilever is formed on a substrate separate from the surface including the sensing material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com