About: http://webisa.webdatacommons.org/411969286

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, a substrate 51 is constituted of conducting material such as silicone, an insulation film 50 is formed thereon, and the insulation film 50 is etched to form the contact hole.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com