About: http://webisa.webdatacommons.org/412106813

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The average thickness of the overlay is preferably less than 1 ??m and particularly less than 0.5 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com