About: http://webisa.webdatacommons.org/412198123

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 66 wherein said scanning probe microscope is an atomic force microscope, and wherein said scanner is driven, at least in part, by at least one piezoelectric element.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es