About: http://webisa.webdatacommons.org/412220774

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The chemical etching manufacturing system of claim 4 wherein the pump is a positive displacement pump.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com