About: http://webisa.webdatacommons.org/412228444

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a technique for measuring the shapes of micropatterns formed in semiconductor memories, integrated operational circuits and other semiconductor devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es