About: http://webisa.webdatacommons.org/412268814

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface of the piezoelectric substrate 1 is cleaned by a wet cleaning using a neutral detergent, an alcohol, or by a dry cleaning using an oxygen plasma, or other suitable material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com