About: http://webisa.webdatacommons.org/412295869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The programmable logic array of claim 4, wherein the metal oxide is an oxide of the first metal layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com