About: http://webisa.webdatacommons.org/41232973

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart for explaining the procedure for manufacturing various microdevices, such as semiconductor chips (e.g., ICs or LSIs), liquid crystal panels, or CCDs, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com