About: http://webisa.webdatacommons.org/413028439

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIGS. 4a-4f, the present invention is a method of forming a rim-type phase-shift lithography mask 140 (FIG. 4f).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com