About: http://webisa.webdatacommons.org/413145123

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, ionizing radiation such as ultra violet light or electron beam may be applied to the resist through the patterned mask.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com