About: http://webisa.webdatacommons.org/413183268

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Here, the insulating layer 1308 can be formed using a material such as silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, or the like by a CVD method, a sputtering method, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com