About: http://webisa.webdatacommons.org/413904517

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic cross sectional view showing an example of processing unit for carrying out a film-forming method according to the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com