About: http://webisa.webdatacommons.org/414017784

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Diamond, Si3 N4, SiC, AlN, or other coating may be deposited using vapor deposition, sputtering, or other conventional and well-known deposition technique.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com