About: http://webisa.webdatacommons.org/414057938

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1A is a schematic illustration of a single substrate processing chamber, showing the substrate positioned in the lower interior region of the chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com