About: http://webisa.webdatacommons.org/414197545

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a cross-section of a first step in the inventive process showing a layer of conductive material (such as tungsten) formed over the substrate; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com