About: http://webisa.webdatacommons.org/414510676

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A thin multiple-layer liner 402 is then deposited over the entire top surface of the dielectric 401, including in particular the trenches (step 503).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com