About: http://webisa.webdatacommons.org/414586278

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Process variations of the thermal treatment, such as a temperature and/or a time, should be reduced to reduce short channel effects.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com