About: http://webisa.webdatacommons.org/41477899

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, there is an increase in the percentage of lighter etchant molecules in the plasma as frequency increases.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com