About: http://webisa.webdatacommons.org/414888772

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a layer of titanium nitride with a thickness of about 5 nm) and a bulk metal layer 30E, such as aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com